ZYGO 7702 BH5-6314 laser head

Product manual:

ZYGO 7702 BH5-6314 laser head is a high-precision dual frequency helium neon laser interferometric measurement light source, mainly used for precision measurement and displacement tracking.
1. Semiconductor manufacturing and photolithography process
In the semiconductor industry, nanoscale measurement accuracy is crucial,
The ZYGO 7702 BH5-6314 laser head plays a key role in the following aspects:
Lithography machine alignment: used for wafer alignment and position feedback to ensure precise stacking of each layer circuit pattern.
Wafer positioning and motion control: Monitor the nanoscale movement of the wafer stage to improve exposure accuracy.
Mask alignment: used for precise positioning of photomask templates to reduce errors.
Wafer flatness detection: used to measure the warpage of wafers and optimize production processes.
2. Precision metrology and interferometry
Surface morphology detection: detecting the surface roughness and shape errors of optical components, lenses, and glass substrates.
Non contact measurement: avoids the errors of traditional mechanical measurement and improves measurement accuracy.
3. Precision machining and CNC control
High precision position feedback for CNC machine tools, such as five axis machining centers and ultra precision turning machines.
Tool displacement monitoring: Ensure that the tool cuts with nanometer level accuracy, improving machining consistency.
Part size control: used for online inspection to ensure that processed parts meet tolerance requirements.
4. Manufacturing and testing of optical components
In the field of high-end optical manufacturing, this laser head is used to measure the surface quality and optical parameters of lenses, mirrors, fibers, etc
Laser interferometer: measures the surface flatness of lenses, prisms, and mirrors.
Free surface detection: detection of high-precision optical components such as car headlight lenses and projection lenses.
Glass and display panel measurement: used for measuring the warpage and thickness of OLED and LCD panels.

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