Tokyo Electron TEB207-12 OGSI EC80-000157-12 Electronic Module Components

Brand:Tokyo Electron
Model:TEB207-12 OGSI EC80-000157-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Tokyo Electron TEB207-12 OGSI EC80-000157-12 Electronic Module Components

Product manual:

Tokyo Electron TEB207-12 OGSI EC80-000157-12 electronic module components, the following are the core information currently available for organization:

Model Description:
manufacturer: Tokyo Electron Ltd.（TEL）

Model 1: TEB207-12

Model 2/Internal Number: OGSI EC80-000157-12

Type: Electronic Module Component/Circuit Control Component

Application Platform: Typically used in TEL semiconductor equipment, such as vacuum etching machines, CVD systems, PVD systems, cleaning equipment, etc.

Functional positioning (based on naming structure and industry experience):
This module may have one of the following functions:

Power Supply/Regulation Unit

I/O Interface Board

Signal Conditioning/Driver Board

PCB module in the process control subsystem

Due to the fact that Tokyo Electronics' products are usually customized modules, many codes such as "EC80-xxxxx" belong to OGSI or TEL internal control part codes, and external information is less publicly available.

Application scenario (speculation):
Equipment models: TEL Unity, Trias, Nexx, Trias SPA, Eagle and other series of etching/deposition equipment

Function: The module may participate in the work of the following subsystems:

Plasma source control

Vacuum state detection/adjustment of the cavity

RF Matcher Adjustment

Temperature control or flow monitoring subsystem