Details
MKS AX8410-28HC Generator Module
Product manual:
MKS AX8410-28HC is a high-power excitation system controller module produced by MKS Instruments, mainly used for applications such as plasma treatment and thin film deposition.
Main features:
High power output: Provides up to 10 kW of power output to meet the needs of high-power plasma processing and thin film deposition.
Wide frequency range: Supports a frequency range from 10 kHz to 100 MHz to meet different process requirements.
High efficiency: Adopting advanced power conversion technology to provide efficient energy transmission and reduce energy consumption.
Precise control: equipped with precise power and frequency control functions to ensure the stability and consistency of the process.
Application areas:
This incentive system controller is widely used in the following fields:
Semiconductor manufacturing: used for thin film deposition, etching, and other plasma treatment processes.
Materials Science: Used for researching and developing thin film deposition and surface treatment of new materials.
Photovoltaic industry: used for thin film deposition and surface treatment of solar cells.
Display technology: used in the manufacturing process of liquid crystal displays and organic light-emitting diodes (OLEDs).
Maintenance and replacement:
Long term use may lead to a decrease in module performance. Regular inspection and replacement of the module can ensure the stability and efficient operation of the process.
Product details picture:

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