MKS AX8403A gas generator

Product manual:

The AX8403A from MKS Instruments is an ozone generator primarily used for industrial and laboratory applications that require high concentrations of ultra clean ozone.
Main features:
High concentration ozone output: Through silent discharge technology, pure oxygen is converted into high concentration ozone, suitable for processes that require high-purity ozone.
Ultra clean design: The required amount of nitrogen doping is minimal, significantly reducing the production of pollutants such as NOx compounds and ensuring high purity of ozone.
Flexible flow range: Supports oxygen flow rates of 5 to 20 slm to meet different process requirements.
Application areas:
Semiconductor manufacturing: used for processes such as wafer cleaning, surface treatment, and thin film deposition.
Photovoltaic industry: used for surface cleaning and passivation treatment in solar cell production.
Display panel manufacturing: used for cleaning and process optimization of LCD and OLED panels.
Medical Device Disinfection: Utilizing the strong oxidizing properties of ozone to efficiently disinfect medical devices.
Technical specifications:
Ozone output: up to 160 grams per hour.
Oxygen flow range: 5 to 20 slm.
Power requirements: 208V, three-phase, 50/60 Hz, 20A.
Size and weight: 483 x 445 x 267 mm, weighing approximately 59 kg.

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