LAM 853-227247-001 Robot Kit

Brand: LAM
Model:853-227247-001
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

LAM 853-227247-001 Robot Kit

Product manual:

The LAM 853-227247-001 robot kit is mainly used in the semiconductor manufacturing field,
Especially in the process of wafer processing, achieving precise and efficient automated wafer transfer.
It is an important component in Lam Research equipment and is suitable for front-end applications
Front End and Back End processes ensure high precision and reliability in the production process.
📌 Product application areas
one ️⃣ Semiconductor Manufacturing (Wafer Processing)
Lithography: In the process of photolithography,
The wafer needs to be accurately fed into the lithography machine and removed to ensure alignment and lossless transmission.
Etching: Used for plasma etching (such as Lam Research 9400, TCP 9600, Versys, etc.),
Accurately transport wafers to avoid particle contamination.
Deposition: Suitable for chemical vapor deposition (CVD)
Atomic layer deposition (ALD) and physical vapor deposition (PVD) equipment ensure uniform processing.
Ion implantation: Sending wafers from a transport system into an ion implantation machine to ensure precise alignment and improve process control capabilities.
Cleaning: in conjunction with cleaning equipment (such as SPTS Omega series),
Safely handle ultra-thin wafers to prevent damage.
two ️⃣ Flat Panel Display (FPD)
Suitable for OLED, LCD, MicroLED panel manufacturing,
Ensure precise transmission of large-sized glass substrates to prevent scratches and dust pollution.
three ️⃣ Advanced Packaging
Used for wafer level packaging (WLP) in 2.5D and 3D IC packaging processes
Automated handling of production lines such as Flip Chip.
four ️⃣ Other high-precision automation
Optical communication MEMS、 Power semiconductor manufacturing: supports high-precision chip transmission,
Special processes applicable to materials such as SiC and GaN.
Laboratory automation: used for scientific research equipment, providing precise sample handling solutions.