LAM 839-019090-620 electrostatic clamp

Brand: LAM
Model:839-019090-620
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

LAM 839-019090-620 electrostatic clamp

Product manual:

839-019090-620 is an electrostatic chuck (ESC) produced by LAM Research, mainly used for clamping and fixing silicon wafers in the semiconductor manufacturing process.
Main features:
High precision clamping: By precisely fixing the silicon wafer with electrostatic force, the stability and positional accuracy of the silicon wafer are ensured during the processing.
Widely applicable: Suitable for semiconductor manufacturing processes such as chemical vapor deposition (CVD), physical vapor deposition (PVD), etching, etc.
High reliability: designed to meet the high requirements of semiconductor manufacturing environments, with excellent durability and stability.
Application areas:
Chemical Vapor Deposition (CVD): Used for depositing thin films on the surface of silicon wafers.
Physical Vapor Deposition (PVD): Used for depositing metals or other materials on the surface of silicon wafers.
Etching: Used for etching patterns on silicon wafers.
Maintenance and replacement:
Long term use may lead to a decrease in the performance of the electrostatic clamp. Regular inspection and replacement of this module can ensure the stability and efficient operation of the semiconductor manufacturing process.