LAM 810-800081-022 controller module

Brand: LAM
Model:810-800081-022
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

LAM 810-800081-022 controller module

Product manual:

The LAM 810-800081-022 controller module is a high-performance control module produced by Lam Research, commonly used in semiconductor manufacturing equipment. It is an important component of process equipment such as plasma etching, chemical vapor deposition (CVD), and physical vapor deposition (PVD), responsible for achieving precise control and monitoring of the equipment. The following is the detailed information of the module:
Product features:
High precision control:
Specially designed for semiconductor manufacturing environments, with excellent precision and response speed.
Capable of real-time monitoring and adjustment of equipment parameters such as pressure, temperature, gas flow rate, etc.
Modular design:
Easy to install, replace, and expand, suitable for various semiconductor process equipment.
Support flexible configuration to meet different process requirements.
High reliability:
Using industrial grade components, it can operate stably for a long time in harsh manufacturing environments.
Has the ability to resist electromagnetic interference, ensuring high stability of the system.
Intelligent functions:
Built in self diagnostic function, which can quickly identify the fault point.
Support collaborative work with other control modules to achieve integration of complex systems.
Technical parameters:
Model: 810-800081-022
manufacturer: Lam Research
Function: Device control and monitoring
Interface type: Supports standard industrial communication protocols (specific models may support RS232, Ethernet, etc.).
Power supply requirements: comply with industrial power standards, please refer to the product manual for specific parameters.
Work environment:
Temperature range: Suitable for semiconductor process environment.
Humidity range: Supports low humidity and clean room conditions.