LAM 810-328372-002 gas panel

Product manual:

Product Features
Accurate gas flow control:
Capable of accurately adjusting the flow rate of different types of gases, typically measured in standard cubic centimeters per minute (SCCM).
Suitable for semiconductor processes such as etching, thin film deposition, chemical vapor deposition (CVD), etc.
High precision sensors:
Built in flow, pressure, and temperature sensors for real-time monitoring of gas flow and environmental conditions.
The sensor has high accuracy, ensuring the stability and accuracy of gas flow and avoiding process instability.
Modular design:
The gas panel is designed to be modular, making it easy to quickly integrate with other equipment systems such as gas supply systems, gas filtration systems, etc.
Provide easy to connect interfaces and support flexible installation and maintenance.
Corrosion resistant materials:
Made of highly corrosion-resistant materials such as stainless steel and fluoroplastics, it can operate stably in highly corrosive gas environments.
Especially suitable for the distribution of highly corrosive gases such as chlorine and fluorine.
Easy to maintain and calibrate:
The design is easy to maintain, and users can easily perform calibration and regular inspections.
Regularly clean and maintain sensors, interfaces, and pipelines to ensure long-term stable operation.
Technical specifications (assuming reference)
Parameter Description
Enter gas types such as nitrogen, hydrogen, oxygen, chlorine, etc
Adjustable range of output gas flow rate: 1-500 SCCM (standard cubic centimeters per minute)
Maximum working pressure 10 bar (depending on specific application)
Working temperature range -10 ° C to 60 ° C
Flow sensor accuracy ± 1% FS (full scale)
Gas leak detection with built-in gas leak monitoring function
Interface type: quick connection, standardized interface
Compact size, suitable for equipment slot and rack installation
Materials: corrosion-resistant materials such as stainless steel and fluoroplastics
Certification CE, UL and other certifications

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