LAM 810-115965-005 frequency board

Product manual:

The LAM 810-115965-005 frequency board is a core electronic module in the LAM Research equipment,
The main function is to cooperate with the signal processing system of the device to achieve frequency generation, adjustment, or monitoring.
This module may be used in semiconductor manufacturing equipment to control RF signals, regulate power frequency, or other applications involving frequency modulation,
Especially in high-precision processes such as etching and deposition, it plays an important role.
Product Features
High precision frequency control:
Support stable and high-precision frequency signal generation and adjustment to meet the complex process requirements of semiconductor equipment.
Capable of processing signals within a wide frequency range and adapting to different process requirements.
Multi functional design:
Can be used as a frequency signal generator, modulator, or monitor.
Support multiple frequency control modes, such as fixed frequency, variable frequency, etc.
Excellent reliability:
Adopting industrial grade components and optimized circuit design to ensure long-term stable operation.
High anti-interference ability, suitable for the complex electromagnetic environment of semiconductor manufacturing equipment.
Modular integration:
Compact design, easy to integrate into the main control system of the equipment.
Provide standardized interfaces for easy communication with other electronic modules.
Real time response capability:
Capable of quickly responding to external commands, adjusting frequency or output signals to ensure real-time control of the equipment.
Technical specifications (assuming reference)
Parameter description
Frequency range 10 Hz to 10 MHz (specific range to be confirmed)
Frequency accuracy ± 0.01% (typical value)
Output signal type: sine wave, square wave, or other user-defined waveform
Control interface analog signal input, digital control interface
Working voltage 5V/12V DC or customized according to equipment requirements
Working temperature range: 0 ° C to 70 ° C
Modular design of size, suitable for equipment space requirements
The anti-interference performance meets the industrial standard EMI/EMC specifications

Product details picture:

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