LAM 810-102361R222 Interlocking Circuit Board

Product manual:

The LAM 810-102361R222 interlocking circuit board is a key component in the equipment of LAM Research,
Mainly used to implement safety interlocking functions during equipment operation.
This circuit board monitors and controls the operating status of the equipment, triggering protection mechanisms when necessary,
Ensure the safe operation of semiconductor manufacturing equipment, protect operators and process environment.
Product Features
Safety interlock function:
Monitor the status of equipment (such as door locks, air pressure, vacuum status, etc.) to ensure that the system meets operational requirements.
When an abnormal state is detected (such as a door not being closed or safety conditions not being met), an alarm is triggered or critical operations are cut off to avoid risks.
High reliability design:
Using industrial grade components, it can work stably in harsh environments such as high temperature and high humidity.
Provide the ability to operate without faults for a long time, meeting the high reliability requirements of semiconductor manufacturing equipment.
Modular structure:
Compact design, easy to integrate into different devices.
Can seamlessly integrate with other security modules or systems.
Real time monitoring and rapid response:
Built in high-performance monitoring chip, capable of real-time detection of status changes and responding to anomalies in milliseconds.
Strong compatibility:
Specially customized for LAM Research equipment, with good compatibility with other control systems of the equipment.
Technical specifications (assuming reference)
Parameter Description
Supply voltage 24V DC or customized according to equipment requirements
Multi channel design with multiple monitoring channels, supporting multi-point status monitoring
Response time<5ms
Working temperature range: 0 ° C to 70 ° C
Interface type: Standard signal interface (such as TTL, I/O interface)
Compact design to fit the internal space of the device
Reliability MTBF ≥ 100000 hours

Product details picture:

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