LAM 810-073479-215 control board

Product manual:

The LAM 810-073479-215 control board is mainly used in the fields of semiconductor manufacturing and high-precision industrial control, and is widely used in the following industries and equipment:
1. Semiconductor manufacturing
Etching Systems: As the core control unit,
Manage key parameters such as power supply, gas flow rate, and temperature during plasma etching process.
Chemical vapor deposition (CVD) equipment: ensures the quality of thin film deposition through precise gas and temperature control.
Physical vapor deposition (PVD) equipment: ensures the stability of power and gas pressure during the sputtering deposition process.
2. Display panel production
OLED/LCD process equipment: used to control key processes such as etching, deposition, and cleaning to improve the yield of display panels.
Photolithography equipment: Responsible for precise motion control and optical system management to ensure the exposure accuracy of fine graphics.
3. Precision industrial automation
High precision machine tools: participate in power management, signal processing, and motion control of CNC machining equipment.
Electronic packaging and testing equipment: ensuring temperature, pressure, and alignment accuracy during the packaging process to ensure the quality of semiconductor packaging.
4. Vacuum and plasma processing equipment
Plasma cleaning system: Monitor and control plasma energy to optimize cleaning effectiveness.
Vacuum coating equipment: Maintain the stability of the vacuum environment and improve the uniformity of coating.
This control board plays an important role in industrial control applications that require high precision, stability, and reliability, and is a key component in LAM Research equipment.

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