LAM 810-01707-013 Gas Box Interlock Module

Product manual:

LAM 810-01707-013 is a gas box interlock module,
Mainly used for gas management systems in semiconductor manufacturing equipment,
Ensure the safe interlocking operation of gas flow rate and gas equipment. The following are its main characteristics:
Gas interlock protection: This module ensures the safe interlock of the gas system with other equipment,
Prevent starting gas equipment in unsafe situations to avoid gas leaks and other potential hazards.
Real time monitoring: capable of monitoring key parameters such as gas flow rate and pressure in real-time,
And automatically trigger alarms or protection mechanisms in abnormal situations.
Multiple security protection: equipped with multiple protection functions, such as overvoltage
Overcurrent and gas leakage monitoring to ensure safe and stable operation of equipment.
Integrated design: Integrating gas interlocking, monitoring, and alarm functions into one module
Simplify system architecture and reduce device complexity.
Remote diagnosis and control: supports remote monitoring and control,
Facilitating real-time monitoring and fault diagnosis for operators, improving equipment maintenance efficiency.
Strong compatibility: Compatible with different types of gas equipment and gas control systems, able to adapt to various application environments.
High reliability and durability: Adopting industrial grade design, it can work stably for a long time in harsh environments such as high temperature and high humidity.
Modular design: facilitates installation, maintenance, and replacement, reduces downtime, and ensures efficient operation of the production line.
This gas box interlock module is widely used in high-precision manufacturing fields such as semiconductors, optoelectronics, and chemical processing,
Used for gas safety management and protection, ensuring the safety and stability of gas equipment during the production process.

Product details picture:

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