BROOKS 162770-01 Semiconductor Wafer Load Port

Product manual:

Brooks 162770-01 semiconductor wafer load port is an automated equipment used in semiconductor production lines,
Mainly used for carrying and transporting wafer boxes, ensuring precise docking and transportation of wafers between various processes.
It is commonly used in cleanroom environments to ensure high cleanliness requirements during semiconductor manufacturing processes.
main features
Automatic docking and precise positioning: Ensure precise docking of the wafer box during transmission, avoiding any physical damage or positional deviation.
High reliability and durability: Designed to operate stably for a long time and meet the high load and precision requirements of semiconductor manufacturing.
Clean design: Complies with cleanroom standards, prevents any contaminants from entering the crystal box, and is suitable for high demand dust-free environments.
Compatible with multiple wafer boxes: Supports wafer box loads of different sizes such as 200mm and 300mm to meet different production needs.
Applicable scenarios
Wafer transfer: Efficiently and accurately transfer wafer boxes between different processes.
Automated production line: Integrated with automated transmission systems, robots, and other equipment to enhance the overall automation and efficiency of the production line.
Cleanroom environment: Ensure efficient operation in a clean environment, reduce human intervention, and avoid pollution.
The Brooks 162770-01 load port ensures the safe and precise transfer of wafers through its high-precision and automated design, optimizing the efficiency of semiconductor production lines.

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