Details
Brooks 017-0266-01 Wafer Processing Robot
Product manual:
Main features:
High precision handling and transportation:
The Brooks 017-0266-01 wafer processing robot has high-precision positioning and handling capabilities,
It can ensure that the wafer is intact and undamaged during the handling process, avoiding vibration
Damage to wafers caused by static electricity or other external factors.
Ensure efficient workflow and production pace.
Support complex path planning:
Brooks 017-0266-01 robot supports complex path planning and dynamic path adjustment,
Capable of flexibly responding to changes in the production environment while ensuring high precision and efficiency.
Strong compatibility:
This robot is compatible with many semiconductor production equipment, such as wafer transfer systems
FOUP, SMIF, cleaning systems, testing equipment, etc. can work together in complex manufacturing environments.
Simplified operating interface:
The interface design is simple and easy to use, allowing equipment operators to quickly grasp the operation mode of the robot,
It is also easy to integrate into automated production processes.
Durability and adaptability:
The robot adopts industrial grade design, with excellent durability and adaptability, and can operate in highly clean environments
Stable operation in cleanrooms such as ISO 14644 Class 1, meeting the high standard requirements of the semiconductor industry.
Application areas:
Semiconductor manufacturing:
This robot is used for wafer handling, cleaning, and transportation in the semiconductor manufacturing process
Tasks such as loading and unloading. It can ensure that throughout the entire production process,
Wafers can be processed accurately and safely, avoiding contamination and damage.
Wafer processing and storage:
During the process of wafer access, storage, and movement, robots provide high-precision operations,
Capable of meeting the automation requirements of complex production processes.
automatic production line:
This robot can cooperate with other machinery and equipment in automated production lines to optimize the production process,
Improve production efficiency and reduce manual operations.
Product details picture:
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