Brooks 013501-161-27 Load Port Module

Product manual:

Brooks Automation's 013501-161-27 load port module is an interface module specifically designed for semiconductor manufacturing and precision automation equipment,
Mainly used for load port management in wafer handling systems.
This module can effectively handle the loading and unloading process of wafers,
Provide support for the safe and precise transfer of wafers from storage units to processing units.
main features
High precision handling: This load port module supports precise wafer loading and alignment,
Ensure that the wafer is not damaged during transmission and maintain high precision during the processing.
Reliable mechanical design: The module adopts a sturdy mechanical structure and materials,
It can maintain stability under high-frequency operation and is suitable for long-term use.
Efficient transmission: The design optimizes the loading and unloading process of wafers,
Reduced the time of each handling cycle and improved overall production efficiency.
Easy to integrate: supports integration with various wafer handling and processing equipment,
Compatible with Brooks or other brands of automation systems, suitable for various automated assembly lines.
Multiple security protections: equipped with sensors and control systems,
Ensure automatic shutdown in case of abnormal situations to avoid damage to equipment and wafers.
application area
Semiconductor manufacturing: used for secure transfer of wafers from storage units to processing equipment,
Widely used for load port management in front-end and back-end processes.
Automated assembly line: suitable for automated assembly and testing equipment that requires precise handling,
Especially in the field of electronic component assembly and testing.
Operate under low interference conditions to ensure product quality.
technical specifications
Loading capacity: Supports standard wafer sizes and adapts to various specifications in the semiconductor industry.
Power requirements: Meet industrial grade power supply standards to ensure continuous and stable operation.
Interface compatibility: Supports standardized interfaces for easy connection with other automation control systems.

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