Brooks 002-7090-11 wafer transfer robot

Brand:BROOKS
Model: 002-7090-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Brooks 002-7090-11 wafer transfer robot

Product manual:

Main features:
High precision positioning and handling:
The Brooks 002-7090-11 robot adopts advanced positioning technology,
Capable of achieving sub micron level positioning accuracy, ensuring accurate positioning of wafers during transportation.
The handling system has been optimized to maintain stability at high speeds,
Reduce vibration during wafer transfer and minimize potential damage to the wafer surface.
Multi degree of freedom motion control:
Equipped with a multi axis, multi degree of freedom control system, capable of moving and rotating wafers on different planes,
Meet the precise requirements of complex processes for position and angle.
This feature is particularly suitable for process steps that require adjusting wafer orientation or height.
Cleanroom compatibility:
Designed to meet the clean room standards of the semiconductor industry, with low particle emission characteristics,
Capable of long-term stable operation in an ultra clean environment, avoiding contamination of the wafer surface.
The material and design have been optimized to operate in high demand environments in clean rooms while reducing maintenance requirements.
High speed transmission capability:
The Brooks 002-7090-11 robot has the ability to quickly transport while maintaining accuracy,
Helps to shorten the transmission time between process equipment, thereby improving production efficiency.
Supports continuous handling of multiple wafers, suitable for high-yield production lines, optimizing the overall speed of the manufacturing process.
Modular design and flexibility:
Adopting modular design, it can be easily integrated into different automation equipment or production lines,
Strong adaptability. Users can flexibly configure according to production needs, making it easy to expand and upgrade.
Support integration with other Brooks devices and third-party control systems to ensure compatibility and consistency of the entire automation system.