AMAT 1007-0016 Controller Module
Brand:AMAT
Model:1007-0016
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
AMAT 1007-0016 Controller Module
Product manual:
AMAT 1007-0016 Controller Module Technical Description
1. Basic information
Model: 1007-0016
Manufacturer: Applied Materials
Equipment type: Semiconductor equipment dedicated controller
Applicable equipment: mainly used in 200mm/300mm wafer processing systems
2. Core functions
Core components of the equipment main control system
Responsible for equipment logic control and timing management
Coordinate communication with various subsystems (transmission/process/detection)
3. Typical applications
Wafer transfer system control
Process equipment timing management
Equipment safety interlock control
4. Technical features
Adopting real-time operating system (VxWorks)
Support SECS/GEM communication protocol
Built in device status monitoring function
Dual redundant power supply design
5. Maintenance points
Daily inspection:
Confirm that the status indicator light (LED) is functioning properly
Check the operation of the cooling fan
Record the operation log of the controller
Fault handling:
Prioritize saving system logs in the event of a malfunction
Check the contact status of the backplane connector
Verify the stability of the power supply (24VDC ± 5%)
Replacement steps:
Disconnect all connecting wires after shutdown
Record the original jumper settings
New module needs to load backup configuration file
Product details picture:
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