AE APEX5513 RF Generator

Product manual:

AE APEX5513 is a high-performance radio frequency (RF) generator produced by Advanced Energy (AE) company,
Widely used in semiconductor manufacturing, thin film deposition, plasma treatment and other fields.
Main features:
High power density: Provides up to 1.5 kW of output power to meet the needs of high-power applications.
Compact design: The compact body design saves space and facilitates integration into existing systems.
Precise control: With precise power regulation and feedback control functions, it ensures the stability and consistency of the process.
Multifunctionality: Supports multiple working modes and adapts to different process requirements.
Application areas:
Semiconductor manufacturing: used for thin film deposition, etching, and other plasma processing processes,
Ensure high-quality thin films and precise etching processes.
Photovoltaic industry: used in the manufacturing process of solar cells for thin film deposition and surface treatment to improve photoelectric conversion efficiency.
Display panel production: used in the manufacturing process of OLED and LCD panels to ensure the uniformity and quality of the film.
Materials Science Research: Used in materials science experiments for thin film preparation and surface modification, supporting the research and development of new materials.
The AE APEX5513 RF generator has become an important equipment in the field of high-precision process control due to its excellent performance and reliability.

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