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MKS EDGE3013A Generator

MKS EDGE3013A Generator

Product manual:

The MKS EDGE3013A RF Generator is a 13.56MHz RF power generator,
Mainly used for high-end industrial applications such as precision plasma processing and semiconductor manufacturing. Its main application areas include:
1. Semiconductor manufacturing
Plasma Etching: Used for fine graphic processing, such as etching silicon wafers, metals, or dielectric layers.
Chemical Vapor Deposition (CVD/PECVD): supports thin film deposition to improve film quality and uniformity.
Ion implantation: The process of ion doping is achieved by controlling the plasma through RF.
2. Solar photovoltaics
Manufacturing of thin-film solar cells: plasma enhanced deposition (PECVD) of photovoltaic cells such as silicon thin films (a-Si), CIGS, CdTe, etc.
Etching and surface passivation of crystalline silicon solar cells: improving light absorption efficiency and conversion efficiency.
3. Manufacturing of Flat Panel Display (FPD)
Thin film deposition and etching in the production of liquid crystal displays (LCDs) and organic light-emitting diodes (OLEDs).
Precision etching and patterning in the production process of AMOLED and Micro LED.
4. LED&Microelectronics Manufacturing
Used for plasma etching, PECVD, and dry etching processes in LED manufacturing,
Ensure efficient and high-precision processing of LED chips.
6. Medical and Biotechnology
Surface modification of biomaterials: optimizing the biocompatibility of materials such as biosensors, implants, microfluidic devices, etc.
Medical equipment manufacturing: plasma surface treatment of dialysis membranes, catheters, etc. to improve performance.
7. Industrial coating
Optical coating: used in the manufacturing of optical filters, laser components, and eyeglass lenses.
8. Communication&Electronic Components
RF MEMS production: used for manufacturing high-performance RF microelectromechanical systems (RF MEMS),
Applied in fields such as 5G and satellite communication.
PCB manufacturing: plasma cleaning and etching in high-density interconnect (HDI) PCB production.
MKS EDGE3013A, as a high stability RF power supply,
Providing precise power control and stable RF output, widely used in industries such as semiconductors, photovoltaics, display panels, LEDs, and high-tech material manufacturing.