MKS AX8407 Ozone Gas Generator
Product manual:
SEMOZON from MKS Instruments ® AX8407 is a high concentration, high flow ozone generator,
Using silent discharge technology to convert pure oxygen into ozone, with high output and high concentration levels.
This device requires only a minimal amount of nitrogen doping and has extremely low nitrogen oxide (NOx) emissions, making it suitable for high demand applications such as semiconductor manufacturing.
Main technical specifications:
Ozone output: up to 335 g/Nm ³
Flow range: 5 to 40 slm
Raw material gas:
Oxygen: Grade 6 or higher purity O ₂
Nitrogen: 100 to 1000 ppm, grade 5 or higher purity N ₂
Chamber pressure: 15 to 45 PSI (100 to 310 kPa)
Cooling water temperature: 5 to 25 ° C
Control mode: front panel control and remote operation
Power requirements: 208 VAC (± 10%), three-phase, no neutral wire, 15A, 50/60 Hz
Size: 483 × 445 × 267 mm (width × depth × height)
Weight: 59 kg (130 pounds)
Application areas:
AX8407 is mainly used in semiconductor manufacturing, including:
Chemical Vapor Deposition (CVD)
Photoresist removal
Wafer Cleaning
Advanced packaging and display panel manufacturing
This device, with its high efficiency and low pollution characteristics, has become a reliable source of ozone gas in high-tech manufacturing processes.
Product details picture:
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