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CONCRENT SSI232.1 029.365.083 Control Board

Siemens 6ES7952-1KL00-0AA0 Programmable Logic Controller

METSO D201138 Controller Module

Brooks 001-7338-09 Robot Module

Brooks 2005-0359-002 Power Supply Circuit Breaker

Brooks 002-5885-02 power module

Brooks T2PCE-S2 Controller

Brooks PRD-0057INT4-02 Internal Module

BROOKS 8046100-P001 Automatic Water Pump

BROOKS 003-9010-03 Vacuum Box Motor

BROOKS 001-3404-02 Main Controller Module

Brooks 002-1600-25 wafer transfer robot